The Focus Topic on Multifunctional and Hybrid Microsystems is dedicated to advancing the science, engineering, and application of micro- and nanoscale systems, with a strong emphasis on system-level integration, multifunctionality, and cross-domain performance. It explores how novel materials, innovative fabrication processes, advanced architectures, and heterogeneous packaging technologies converge to create integrated systems that operate seamlessly across different physical domains, including electromechanics, soft electronics, MEMS/NEMS, optomechanics, quantum phononics, RF acoustics, magnetoacoustics, bioelectronics, bio-MEMS, and robotics. The Focus Topic will also highlight system-level approaches and co-design methodologies that integrate diverse functionalities (such as sensing, actuation, signal processing, and wireless communication), optimize the synergy between these functional components and overall system architectures, and enable the creation of intelligent, adaptable, and highly integrated solutions.
MC-MoA: Multifunctional and Hybrid Microsystems: Optomechanics and Quantum Transduction
- Jesse Berezovsky, Case Western Reserve University, “Magnetic Nanostructures for Coupling and Control of Defect Spin Qubits”
- Thomas Purdy, University of Pittsburgh, “All-Dielectric Cavity Electro-Optic Systems for Quantum Sensing and Transduction”
- Han Zhao, University of Central Florida, “A Quantum Microwave-Optical Interface via Silicon Nanomechanics”
MC-TuM: Multifunctional and Hybrid Microsystems: MEMS and Bio Applications
- Hanna Cho, The Ohio State University, “Redefining Dynamic Limits of MEMS Resonators via Nonlinear Dynamics”
- Mingyo Park, Pennsylvania State University, “Multifunctional AlN-Based MEMS Resonator Platforms for Advanced RF Filtering and Sensing Applications”
MC-ThP: Multifunctional and Hybrid Microsystems Poster Session