The Focus Topic on Multifunctional and Hybrid Microsystems is dedicated to advancing the science, engineering, and application of micro- and nanoscale systems, with a strong emphasis on system-level integration, multifunctionality, and cross-domain performance. It explores how novel materials, innovative fabrication processes, advanced architectures, and heterogeneous packaging technologies converge to create integrated systems that operate seamlessly across different physical domains, including electromechanics, soft electronics, MEMS/NEMS, optomechanics, quantum phononics, RF acoustics, magnetoacoustics, bioelectronics, bio-MEMS, and robotics. The Focus Topic will also highlight system-level approaches and co-design methodologies that integrate diverse functionalities (such as sensing, actuation, signal processing, and wireless communication), optimize the synergy between these functional components and overall system architectures, and enable the creation of intelligent, adaptable, and highly integrated solutions.
Areas of Interest: Within the framework of Multifunctional and Hybrid Microsystems, six major Areas of Interest are planned as:
- Optomechanics and Quantum Phononics
- RF Electroacoustics and Magnetoacoustics
- MEMS and NEMS
- Soft Electronics, Bioelectronics, Bio-MEMS, and Robotics
- Microscale Additive Manufacturing
- Heterogeneous Integration
MC1: Multifunctional and Hybrid Microsystems Oral Session
Invited Speakers:
- Jesse Berezovsky, Case Western Reserve University
- Hanna Cho, The Ohio State University, “Exploring a Broad Nonlinear Dynamic Range in Next-Generation MEMS Resonators”
- Eric Markvicka, University of Nebraska-Lincoln
- Mingyo Park, Penn State University
- Thomas Purdy, University of Pittsburgh, “All-Dielectric Cavity Electro-Optic systems for Quantum Sensing and Transduction.”
- Han Zhao, University of Central Florida, “A Quantum Microwave-Optical Interface via Silicon Nanomechanics
MC2: Multifunctional and Hybrid Microsystems Poster Session