The Spectroscopic Ellipsometry Topic positions spectroscopic ellipsometry as a core, polarization-resolved optical metrology for understanding materials, interfaces, and thin film systems across fabrication, characterization, and application-driven research. The session emphasizes how ellipsometry provides quantitative access to optical, electronic, and structural properties, enabling direct connections between material growth, physical response, and functional performance. The topic highlights advances in ellipsometric analysis and instrumentation that extend sensitivity from atomic-scale film evolution to complex anisotropic and nanostructured systems, while supporting insight into optical transitions, interfacial processes, and spatially heterogeneous responses. By bridging real-time growth monitoring, detailed optical modeling, and emerging application spaces, the EL Topic reflects the evolving role of spectroscopic ellipsometry as an enabling platform for modern materials science and engineering. We will also focus on workforce development for future spectroscopic ellipsometry, with a focus on student talks and awards for best oral presentation and best poster in the EL session.
Areas of Interest: EL seeks abstracts in the following areas:
- Advances in Spectroscopic Ellipsometry Methods:
Noise reduction and signal processing techniques. In situ instrumentation and real-time growth monitoring. Novel ellipsometry hardware and measurement strategies. Artificial intelligence and machine learning approaches for ellipsometric data analysis and modeling. - Applications in Materials and Thin Films:
Semiconductor, dielectric, and two-dimensional thin films. Optical anisotropy, birefringence, chirality, and polarization resolved platforms. Nanophotonics, metamaterials, and metasurfaces. Energy-related materials, including solar, battery, and thermoelectric systems. Emerging and quantum materials are studied using spectroscopic ellipsometry. - Workforce Development
Student-led research and training in spectroscopic ellipsometry. Best Oral and Best Poster Presentation Awards.
EL1: Spectroscopic Ellipsometry Oral Session
Invited Speakers:
- Matthew Hilfiker, Onto Innovation
EL2: In-Situ Ellipsometry for Atomic Scale Processing Oral Session
Invited Speakers:
- Gottlieb Oehrlein, University of Maryland, “In-Situ Ellipsometry for Atomic Scale Processing”
- Eva Schubert, University of Nebraska–Lincoln, “Atomic Processes in Surface-Limited ALD growth Studied by Real-Time Spectroscopic Ellipsometry.”
EL3: Spectroscopic Ellipsometry Poster Session