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Abstract Submission

Home Abstract Submission

Call for Late-Breaking Abstracts

Submit Your Abstract Now Through:
September 14, 2026

Abstract Submission Guidelines

*** A presenter may present ONE ORAL AND ONE POSTER at the Symposium***
Contributed oral presentations are 15 minutes, and invited talks are 30 minutes.

Please review Steps 1-5 below before entering the online abstract submission site.

  • Step 1

    Before signing up or logging into the online system (in Step 5), please review all of the following steps to ensure you have the information needed to complete the abstract submission process.

    Please Note the Following Requirements Prior to Submission:

    If you are planning to submit multiple abstracts, presenters are limited to one oral and one poster presentation. (Note: they must be different abstracts).

  • Step 2

    Review the session topics from the list below. See the Areas of Interest for each topic (these details will be included as pop-ups for each topic on the submission page) and then choose to submit to the topic’s Oral or Poster Session. Note that the Program Committee will build the final sessions based on submissions during program development.

  • Step 3

    Fill out the abstract content and author details in the system (abstract 2,700 characters max., including grammar and spacing; you may also submit a supplemental 1-page PDF file containing any graphs, charts, or pictures you wish to include).

  • Step 4

    Agree to the copyright agreement. If you have questions e-mail yvonne@avs.org.

STEP 5

Due by 11:59 p.m. ET

Submit by September 14

Author Notification

Acknowledgment that your abstract has been submitted will follow by email shortly after submission, with official acceptance/scheduling emails to be sent by late September. Submissions will remain open until September 14.

Topics

2D Materials (2D)
Actinides and Rare Earths (AC)
Advanced Microelectronic Materials and Devices (AM)
Advanced Packaging (PK)
Advanced Surface Engineering (SE)
Advances in Battery Engineering, Interface Design, and Characterization (BT)
Advances in EUV Lithography (EUV)
AI/ML for Scientific Discovery (AIML)
Applied Surface Science (AS)
Atomic Scale Processing (AP)
AVS Quantum Science Workshop (AQS)
Biomaterial Interfaces (BI)
Biomaterial Plenary (BP)
Chemical Analysis and Imaging of Interfaces (CA)
Electronic Materials and Photonics (EM)
From Ionic Crystals to Ionic Conductivity: A Special Celebration of Gary W. Rubloff's 50+ Years in Science (GWR)
Light Sources Sciences (LS)
Magnetic Interfaces and Nanostructures (MI)
Manufacturing Science and Technology (MS)
Materials and Innovations for Fusion Energy (FUS)
Multifunctional and Hybrid Microsystems (MC)
Nanoscale Science and Technology (NS)
Nanoscale Science and Technology Plenary (NSP)
Plasma Science & Technology (PS)
Quantum Science and Technology (QS)
Spectroscopic Ellipsometry (EL)
Surface Science (SS)
The Future of Temperature Sensing (TS)
Thin Films (TF)
Undergraduate Posters (UN)
Vacuum Technology (VT)
2D Materials (2D)
  • 2D+QS-TuM: Novel Quantum 2D Materials
  • 2D-TuA: Synthesis and Processing of 2D Materials
  • 2D-WeA: Surface-Sensitive Techniques for 2D Materials Characterization
Learn More
  • 2D-WeM: 2D Materials: Electronic, Magnetic, Mechanical, and Optical Properties
  • 2D-ThM: 2D Materials Devices and Applications
  • 2D-ThP: 2D Materials Poster Session
Actinides and Rare Earths (AC)
  • AC-ThM: Actinides and Rare Earths Early Career
  • AC-FrM: Actinides and Rare Earths Science
  • AC-ThP: Actinides and Rare Earths Poster Session
Learn More
Advanced Microelectronic Materials and Devices (AM)
  • AM1+EM+TF-WeA: Industry Perspective
  • AM2+EM+TF-WeA: Devices I
  • AM+EM+TF-ThM: Ferroelectric Thin Films
  • AM+EM+TF-ThA: ALD Fundamentals to Devices & Flash Session
Learn More
  • AM+EM+TF-ThP: Advanced Microelectronic Materials and Devices Mini-Symposium Poster Session
  • AM1+EM+TF-FrM: Materials Discovery and Synthesis
  • AM2+EM+TF-FrM: Devices II
Advanced Packaging (PK)
  • PK-ThP: Advanced Packaging Poster Session
  • PK+MS-FrM: Advanced Packaging Oral Session
Learn More
Advanced Surface Engineering (SE)
  • SE-ThA: Advanced Surface Engineering Oral Session
  • SE-ThP: Advanced Surface Engineering Poster Session
Learn More
Advances in Battery Engineering, Interface Design, and Characterization (BT)
  • BT1+AS+CA+TF-ThM: Interface Engineering in Batteries
  • BT2+AS+CA+TF-ThM: Advanced Battery Electrodes
  • BT-ThA: Advanced Characterization of Battery Interfaces
Learn More
  • BT+AS+CA+TF-FrM: Solid-State Batteries
  • BT+AS+CA+TF-ThP: Advances in Battery Engineering, Interface Design, and Characterization Mini-Symposium Poster Session
Advances in EUV Lithography (EUV)
  • EUV-MoM: Advances in EUV Lithography II
  • EUV-MoA: Advances in EUV Lithography II
  • EUV-ThP: Advances in EUV Lithography Poster Session
Learn More
AI/ML for Scientific Discovery (AIML)
  • AIML1-ThM: Linking AI/ML Tools with Diagnostics and Film Growth: PLD/CVD/ALD
  • AIML2-ThM: AI/ML Tools in Molecular Beam Epitaxy & Flash Session
  • AIML1-ThA: AI/ML in Materials Characterization
  • AIML2-ThA: AI/ML-enhanced RHEED in Thin Film Growth
  • AIML-ThP: Poster Session
Learn More
  • AIML1-FrM: Materials Design and Autonomous Discovery
  • AIML2-FrM: AI/ML in Semiconductor Processing & Manufacturing
  • AIML3-FrM: Connecting Datasets, Models, and Characterization
  • AIML4-FrM: Panel: Funding Agencies
Applied Surface Science (AS)
  • AS-TuM: Applied Surface Science in Action I
  • AS-TuA: Applied Surface Science in Action II
  • AS-WeM: Advances in Sputtering
  • AS-WeA: ToF SIMS in Applied Surface Science
Learn More
  • AS-ThM: Complex Data Analysis For Applied Surface Science
  • AS-ThP: Applied Surface Science Poster Session
Atomic Scale Processing (AP)
  • AP+EL+EM+PS+TF-TuM: Area Selective Processing and Patterning
  • AP1+EL+MS+PS+TF-TuA: Advanced Atomic Scale Processing through Modeling and Simulation
  • AP2+EL+PS+TF-TuA: Advancing X-Ray Photoelectron Spectroscopy to enable Atomic Scale Processing
  • AP+EL+PS+TF-WeM: Thermal and Plasma-Enhanced Atomic Layer Etching
  • AP+2D+EL+EM+PS+TF-WeA: Atomic Scale Processing to Enable 2D Materials
  • AP+EL+MS+PS+TF-ThM: Advancing Spectroscopic Ellipsometry and Other in-Situ Techniques to Enable Atomic Scale Processing
Learn More
  • AP+EL+MS+PS+TF-ThA: Advancing Atomic Scale Processing Through Novel Sources and Pulsing Methods
  • AP+EL+PS+TF-ThP: Atomic Scale Processing Mini-Symposium Poster Session
  • AP1+EL+PS+TF-FrM: Thermal and Plasma-Enhanced ALD
  • AP2+EL+PS+TF-FrM: Enabling Atomic Scale Processing (ALD/ALE) by leveraging new Precursors and Surface Reactions
AVS Quantum Science Workshop (AQS)
  • AQS-SuA: AVS Quantum Science Workshop Session (ALL-INVITED SESSION)
Learn More
Biomaterial Interfaces (BI)
  • BI-MoM: Biofilms, Biofouling, and Biomolecules at Interfaces
  • BI-MoA: The Future of Biointerface Science
  • BI1-TuM: Biomaterials and Nanomaterials Fabrication I
  • BI2-TuM: Biomaterials and Nanomaterials Fabrication II
Learn More
  • BI3-TuM: Characterization of Biological and Biomaterials Surfaces
  • BI-TuA: Functional Materials and Biosensing
  • BI-ThP: Biomaterial Interfaces Poster Session
Biomaterial Plenary (BP)
  • BP+BI-SuA: Biomaterials Plenary Session
Learn More
Chemical Analysis and Imaging of Interfaces (CA)
  • CA-ThP: Chemical Analysis and Imaging at Interfaces Poster Session
  • CA1-FrM: Chemical Analysis and Imaging at Interfaces Oral Session I
  • CA2-FrM: Chemical Analysis and Imaging at Interfaces Oral Session II
Learn More
Electronic Materials and Photonics (EM)
  • EM1: Electronic Materials and Photonics Oral Session
  • EM2: Advanced Microelectronic Materials for Next Generation Microelectronics Oral Session
  • EM3: Electronic Materials and Photonics Poster Session
Learn More
  • EM-WeM: Advances in Wide Bandgap, Piezoelectric Materials and Devices
  • EM-ThP: Electronic Materials and Photonics Poster Session
From Ionic Crystals to Ionic Conductivity: A Special Celebration of Gary W. Rubloff's 50+ Years in Science (GWR)
  • GWR-MoM: From Ionic Crystals to Ionic Conductivity: A Special Celebration of Gary W. Rubloff’s 50+ Years in Science
  • GWR-MoA: From Ionic Crystals to Ionic Conductivity: A Special Celebration of Gary W. Rubloff’s 50+ Years in Science II
Learn More
Light Sources Sciences (LS)
  • LS-MoM: Light Source Enabled ARPES
  • LS-MoA: Light Source Enabled Science
  • Learn More
  • LS-TuM: Light Source Enabled Energy Science
  • LS-ThP: Light Source Enabled Science Poster Session
Magnetic Interfaces and Nanostructures (MI)
  • MI-MoM: Advanced Magnetic Materials in Low-Dimensional Structures I
  • MI1-MoA: Advanced Magnetic Materials in Low-Dimensional Structures II
Learn More
  • MI2-MoA: Emergent Magnetism at Molecular Interfaces, Chirality-Induced Spin Selectivity, Molecular Magnetoresistance
  • MI-ThP: Magnetic Interfaces and Nanostructures Poster Session
Manufacturing Science and Technology (MS)
  • MS-ThP: Manufacturing Science & Technology Poster Session
Learn More
Materials and Innovations for Fusion Energy (FUS)
  • FUS-TuA: Materials and Innovations for Fusion Energy (ALL-INVITED SESSION)
  • FUS-WeM: Fusion Materials, Plasma-Facing Components, and Tritium Engineering
Learn More
  • FUS-WeA: Materials for Fusion Fuel Containment
  • FUS-ThP: Materials and Innovations for Fusion Energy Poster Session
Multifunctional and Hybrid Microsystems (MC)
  • MC-MoA: Multifunctional and Hybrid Microsystems: Optomechanics and Quantum Transduction
  • MC-TuM: Multifunctional and Hybrid Microsystems: MEMS and Bio Applications
  • MC-ThP: Multifunctional and Hybrid Microsystems Poster Session
Learn More
Nanoscale Science and Technology (NS)
  • NS-MoM: Frontiers in Nanoscale Electron, Ion, and Scanning Probes I
  • NS-MoA: Frontiers in Nanoscale Electron, Ion, and Scanning Probes II
  • NS-TuM: Multimodal Techniques in Surface and Interface Engineering at the Nanoscale
Learn More
  • NS-TuA: Multimodal Techniques in Surface and Interface Engineering at the Nanoscale II
  • NS-ThP: Nanoscale Science and Technology Poster Session
Nanoscale Science and Technology Plenary (NSP)
  • NSP-SuA: Nanoscale Science and Technology Plenary Session (ALL-INVITED SESSION)
Learn More
Plasma Science & Technology (PS)
  • PS+AP-MoM: Plasma Processes for Advanced Interconnects
  • PS1-MoA: Plasma Diagnostics
  • PS2-MoA: Plasma Catalysis and Synthesis
  • PS1-TuM: High Aspect Ratio and Cryogenic Etching I
  • PS2-TuM: High Aspect Ratio and Cryogenic Etching II
  • PS1-TuA: Atmospheric and Liquid Plasmas
  • PS2+EUV-TuA: Plasma Processes for Feature Scaling
  • PS1-WeM: Plasmas for 3D Integration
Learn More
  • PS2-WeM: Plasma Applications in Packaging and Wafer Bonding
  • PS1-WeA: Machine Learning for Plasma Processes
  • PS2-WeA: Low Global Warming Potential and Sustainability in Plasma Processing
  • PS1-ThM: Advanced Ion and Reactant Control I
  • PS2-ThM: Advanced Ion and Reactant Control II
  • PS-ThA: Simulation for Plasma Processes
  • PS-FrM: Novel Chemistries and Materials in Plasma Processing
  • PS-ThP: Plasma Science and Technology Poster Session
Quantum Science and Technology (QS)
  • QS-MoM: Qubit Modalities I — Hybrid Superconducting–Semiconducting Quantum Devices
  • QS1-MoA: Scalable Superconducting Qubits, Materials, and Integration
  • QS2-MoA: Surfaces, Interfaces, Defects, and Microwave Loss in Superconducting Devices
Learn More
  • QS-TuM: Quantum Sensing, Simulation, and Emerging Quantum Applications
  • QS-ThP: Quantum Science and Technology Poster Session
Spectroscopic Ellipsometry (EL)
  • EL-ThA: Spectroscopic Ellipsometry Oral Session
  • EL-ThP: Spectroscopic Ellipsometry Poster Session
Learn More
Surface Science (SS)
  • SS-MoM: Precision On-Surface Synthesis
  • SS-MoA: Surface Electronic, Magnetic, and Optical Properties
  • SS-TuM: Dynamics
  • SS-TuA: Chemical Reactions
  • SS-WeM: Heterogeneous Catalysis
Learn More
  • SS-WeA: Somorjai
  • SS-ThM: Reduced Dimensional Systems
  • SS-ThA: Rising Stars
  • SS-ThP: Surface Science Poster Session
  • SS-FrM: Photo- and Electrochemical Energy Conversion
The Future of Temperature Sensing (TS)
  • TS-TuA: The Future of Temperature Sensing I
  • TS-WeM: The Future of Temperature Sensing II
  • TS-WeA: The Future of Temperature Sensing III
Learn More
  • TS-ThM: The Future of Temperature Sensing IV
  • TS-ThM: The Future of Temperature Sensing IV
  • TS-ThP: The Future of Temperature Sensing – Poster Session
Thin Films (TF)
  • TF1-MoA: Thin Films for Energy
  • TF2-MoA: Fundamentals of TF I
  • TF-TuM: Fundamentals of TF II & Flash Session
  • TF1-TuA: VSHOP Fundamentals
  • TF2-TuA: VSHOP Applications I, Membranes and Fluidics
Learn More
  • TF1-WeM: VSHOP Hybrid CVD and MLD
  • TF2-WeM: VSHOP Applications II, Semiconductor Manufacturing
  • TF-WeA: Far from Equilibrium Thin Films and Processes
  • TF-ThP: Thin Film Poster Session
Undergraduate Posters (UN)
  • UN-ThP: Undergraduate Poster Session

Learn More

Vacuum Technology (VT)
  • VT+FUS-WeA: Vacuum Technology Fusion
  • VT-ThM: Vacuum Technology Big Vacuum Systems and Accelerators
  • VT-ThA: Vacuum Technology Flow and Pumps
Learn More
  • VT-ThP: Vacuum Technology Poster Session
  • VT-FrM: Vacuum Technology Pressure Measurement

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Key Dates

Major Awards Deadline:
March 31, 2026

Student Awards Deadline:
May 18, 2026

Abstract Submission Deadline:
May 18, 2026

Late News Abstract Submission Deadline:
September 14, 2026

Hotel Deadline:
September 30, 2026

Early Registration Deadline:
October 5, 2026

 

Contact

Yvonne Towse
Conference Administrator
125 Maiden Lane; Suite 15B
New York, N.Y. 10038
yvonne@avs.org

 

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